6AV6645-0BE02-0AX0

6AV6645-0BE02-0AX0 PLC控制的單體試車

本步驟試驗的目的是確認PLC輸出回路能否驅動繼電器、接觸器的正常接通，而使設備運轉，并檢查運轉后的設備，其返回信號是否能正確送人PLC輸入回路，限位開關能否正常動作。

其方法是，在PLC控制下，機內強置對應某一工藝設備(電動機、執行機構等)的輸出節點，使其繼電器、接觸器動作，設備運轉。這時應觀察并記錄設備運輸情況，檢查設備運轉返回信號及限位開關、執行機構的動作是否正確無誤。

試驗時應特別注意，被強置的設備應懸掛運轉危險指示牌，設專人值守。待機旁值守人員發出指令后，PLC操作人員才能強置設備起動。應當特別重視的是，在整個調試過程中，沒有充分的準備，絕不允許采用強置方法起動設備，以確保。

General Electric GE EPM Electronic Power Meter GOOD!

GE EPM5300P Multifunction Power Monitor PL53002A0B* 

GE Multilin Meter EPM5350 with Ethernet Communications

General Electric GE 2000 memory EPM 01 44A719337 104

GE General Electric 44A719337-108R0?3 PAC02 EPM01 Board

GE Power Leader EPM Phase II 2 Electronic Power Meter

ETEL DSB2P123-111E-000H

SMC  CXSM25-80-Z73L

SMC CXSM25-100-Z73L

Intel  451548-003 W/09-04433

Critec Erico TDX100C 277/480 

HP Agilent 5517D Laser Head C16

Blue M Oven POM-336E-1 W/CIRCULAR RECORDER

Numatics Cylinder 1500DC2-15A

Numatics Cylinder 1500DC2-09A

Numatics Cylinder 1500DC2-08A-04

Motor Baugrobe 4300 Version 2.2

Voltage Regulator & Lamp Control Module 095-0508 

New HSH1500CIEO HSH 1500 CIEO Replaces HBO1500W/CIEL

Osram HBO 100 W/2

Ultratech item 0180502-3-01 PHD Inc.

Ushio USH-102DH 

Qualiflow Valve FNOM2HF

ASM 50-125108A24 MKS 153D-2-50-2 

Brooks Instruments Sho-Rate 1355DA1G1BAA

Brooks Instruments Sho-Rate 1370CB1C2EAS 

Dwyer RMA-84-SSV 4-40 GPH 

Micro Memory Inc. MM-6200 Rev. K

CT 170P001671 I/O Board

CT 170P001664 ADC/MCS Micro Board

Dwyer RMB-53-BV SCFH Air 10-100

ASML/SVG 4022.455.48161 W-F-V-6

ASML/SVG 4022.455.48171 W-F-9-6

ASML/SVG 4022.436.4492

ASML/SVG 4022.437.2886

ASML/SVG 4022.456.07242 8

 T.E.M Gas filter No. TEM-813-6S

VAT Pneumatic Rectangular Gate Valve F02-76569-01

Keyence LX2-V10W Controller Laser Thrubeam Sensor

Keyence Corp. LX2-12 Laser Thrubeam Sensor Head

Unit Instruments UFC-1100A Mass Flow Controller N2

Unit Instruments UFC-1100A Mass Flow Controller N2

Unit 1660 UFC-1660 Mass Flow Controller Rebuilt

Aera FC-D980C Mass Flow Controller 500 SCCM SIH4

Aera FC-D980C Mass Flow Controller -4 Multi Gas

UFC-2050A Unit Instruments Mass Flow Controller N2

Unit Instruments UFC-8100 Mass Flow Controller N2

Vernier Software Heart Rate Monitor HRM-DIN

HSH1500CILO HSH 1500 CILO Lamp

Automated Production Systems Inc.GC12 Tape Marker

DOT Two Thornton DI Resistivity Monitor SPT-109

Stainless Steel Heating/Cooling Coil

System General DIP-Adapter Programmer

Waldmann Lichttechnik DWDV 206 Lighting case

Tokyo Electron 26-1224-001 Piston, HE Fluidic Seal

Air Products Gasguard 500 Gas Cabinet 801-4704730

Nalgene LDPE Carboy 2 gallon lot of 4 2302-0005

ASML/SVG ATWT 4022.484.96532 Coil Limms ASSY

ASML/SVG 859-0929-006B Stage Decoupling/Over Current

ASML/SVG 854-8089-002C Perkin-Elmer Assy

ASML/SVG 851-8877-002C Perkin-Elmer Assy A1302

ASML/SVG 4022.435.3541

ASML/SVG 859-0929-006A Stage Decoupling/Over Current

ASML/SVG 859-0984-002A Current Drive Board

ASML/SVG 859-0984-002C Current Drive Board

ASML 4022.436.5024 SVG

BV6-8F Entegris (Fluoroware) Magnaflo Plug Valve 2-way

Furon Valve 3 way UPM3-F812-MT 3/4" Flare Ports

Lam Research Box RF Switch 853-017163-001-D-C221

AP Tech Valve AP3625S 2PW FV4 FV4

VAT Pneumatic Rectangular Gate Valve F02-56927/38

Veriflo Valve IR401W-2P-FS-MF

AMAT Applied Materials Mainframe Module 5000 Etch.

Nikon Motorized Stage With 2  Chuck

WG3D205R2 Entegris/Mykrolis FV-50K Diffuser

 Entegris/Mykrolis/Millipore WG3NS2RR2

Entegris/Mykrolis WG3D40DR2 FV-40K Diffuser

Entegris/Millipore WGPMSURR2 Unigard Filter

Unit UFM-1100 Mass Flow Controller HE 3 SLM

Unit UFC-1100A Mass Flow Controller HE 1.5 SLM

Unit UFC-1100 Mass Flow Controller NF3 500 SCCM

AP Tech Valve AP3550SZ 2PW FV4 FV4

AP Tech AP3625SXK 4PWN FV4 MV4 FV4 MV4

AP Tech AP1002SXK 3PW MV4 MV4 V3

National Instruments P/N 182801A-002 MXI2-1 2 m Cable

ASML/SVG PAAC 450/20 Power Supply Module 4022.471.7669

Tokyo Electron Track AC Power Box Cabinet PB122-U300-02

Semi Gas Purge System Argon Gas Handling Safety System 

Advanced Radiation Corp. 350 Watt Short ARC Lamp.

Canon Stepper Lens Part KB-02

Semi Gas System TEOS Manufactured for Advanced Delivery

AMAT Part 0100-90286 Applied Material Beam Profiler

AMAT Part Number 0100-00828 Applied Material Vibration

AMAT Part Number 0100-00860 Beam Stability Monitor

AMAT Part Number 0100-00929 I/V Converter-Beam Profile

AMAT Part Number 0100-90025 24V 1A Power Supply

AMAT Part Number 0100-90970 Beam-Profiler Micro Control

AMAT Part Number 0100-91105 I/V Converter Power Supply

High Vacuum Appartus Valve 922-0009

VAT Pneumatic Rectangular Gate Valve F02-57454-02

VAT Pneumatic Rectangular Gate Valve F02-58413-03

Emission Technology Combustion Catalyst System 80160/DC

Global Navigation GNS-500A CRT/CDU VLF Omega

Global Navigation GNS-500A CRT/CDU VLF Omega 11600-6

Digi 8-port RJ45 I/O box PN 50000010

ASM 48-122952A39 Schaffner FN258-30-33 Filter EMC/RFI

Unit UFC-1100A Mass Flow Controller N2 500 SCCM

Unit UFC-1100A Mass Flow Controller N2 20 SCCM

Unit UFC-1100 Mass Flow Controller CL2 200 SCCM

Tylan Mass Flow Controller FC-280SAKZ N2 Model FC-280S

Tylan 2900 Series Mass Flow Controller FC-2950M-EP

Tylan 2900 Series Mass Flow Controller FC-2900MEP HCL

Meridian Laboratory MX-5/ASM 44-121130A02

New ASM Kit-Internal Assy-4.00 PNEU Valve 50-110109A67

ASML/SVG 4022.454.59231 Beam Steering Fixed Mirror

ASML/SVG 4022.486.04192 ATWT HALB MAGNET PLATE CAS TP

Semiconductor Systems 09-04352 PB 146298 (2) 09-04396-B

Semiconductor Systems 09-04352,PB 146298,09-04393?-B Bo

Unit Instruments Mass Flow Controller UFC-1000 N2 5 SLM

Unit Instruments Mass Flow Controller UTS-1100 N2 10L

BOC Edwards lot B27158171,C10517403,C10517490 15 items

SMC EVZ512M SOLENOID VALVE (5)

Logical Device, Inc. HC705 Device Programming Adaptor

Gas Analyzer GOW-MAC Instrument Co. Model 24-520-1C

Duffers Associates Inc. Current Analyzer DSI 8100

New ASM 65-106645A24 MKS PRD-C-2C Meter-Digital Readout

ASM C000906A Fujikin FPR-SD-71-6.35-2 Pneumatic Valve

ASML 4022.436.2492 Demo Align. Module board SVG

ASML 4022.437.0198 Power Amplifier Module SVG

ASML 4022.437.2993 8 Channel Fiber Optics card SVG

ASML/SVG Agilent Z4203B HPLR Laser

CT 170P001674 BIAS/UZ-PP Board

Global-Wulfsberg Systems Color CDU GNS-X

SMC Cylinder CDQ2WB125C-UIA950045

GEMU CleanStar C60 8D75305A2HPW Series Ultra Pure

FURON PV1-66 Tef Plug VLV

AMAT Part Number 0090-90966 daq Mkll Type B

AMAT Part Number 0100-90870 4 Phase Stepper Controller

AMAT Part Number 9090-00889ITL daq Scan Efficiency

ASML/SVG Jenoptik Jena Lens Lot of 8 

ASML/SVG 865-8009-001-B Stage Decoupling/Over Current

ASML/SVG 859-0984-004A

ASML/SVG 859-0984-002A

ASML/SVG 859-0928-007A A1304/A1305

CTI-Cryogenics Gas Heater 8044051/Purge pump 8044047

Faulhaber DC Motor 3557K024

KNF Flodos PLM 1246-ND 300

Motor with Decoder

Schmersal AZ1602YP Switch Solenoid latching safety

Dual Cassette Robot Loader

Furon HPV2-144NC Valve

Extraction Sub Assy Filterbox ES1001894-03/ULPA

 ASML 4022.481.99503 

ASML 4022.481.70364 

ASML/SVG 4022.435.05718 8” Wafertable

ASML/SVG 4022.437.0315 AligNm Laser C. Module

Swagelok SS-BNV51-C Bellows-Sealed Valve Nupro

ASML/SVG Module 4022.437.1996

Swagelok 316L-4-VCO-3A (25) Valve Fitting Cajon

Swagelok Cajon SS-4CA-VCR-50 Poppet Check Valve 

Swagelok SS-2-HC-1-4 Hose Connector  x 1/8” (25)

Swagelok SS-4-VCR-1-00039 316 SS VCR Face Seal Fitting

Swagelok SS-45S8 Ball Valve NO HANDLE Whitey

KLA Tencore VME Modified 740-760202-00 Rev. A4

Imaging Tech OFG-VP1100 Frame Grabber

ASM 50-123824A25 VAT 26328-KA01-0002/2556

ASM 50-123824A25 VAT 26328-KA01-0002/3203 

ASM 50-123824A26 VAT 26328-KA11-0001/0890 

ASM 50-123824A26 VAT 26328-KA11-0001/1160

Adept 10300-15400 

Adept Tech Control Module 10300-15100 Amplifier A-Type

Varian IIS E11029470 Rev 6

Integrated Flow System Inc. SR4-120-6T-3XX3-S10-80/10

Del Electronics Corp. B4425 

New Filterite DFN 30-20AN 276 Tokyo Electron 53-0140-0

Varian 951-5091 

Whitey/Swaglok SS-43VCR4 2 

ASML 4022.470.0166 Two Maxon Motor Gears SVG

ASML 4022.455.82561 Zeiss filter 3668/700 Stepper 8323 

ASML 4022 481 05757/05767 LS LM LAMP ASSY bulb lot 39

Varian 941-6501 VACSORB Sorption Pump with heater

Nor-Cal ESVP-300 valve

 Koyo PLC Direct Logic Programable logic Control

 Condor Power Supply Model MPS-140

SVG/ASML 859-0534-005 Robitech Inc. Solenoide 990-9024

CT 170P001670 Mother Board

Proteus Industries Inc. 100C Fluid Flow Switch

Dayton 1/6 HP 3K479B 

VAT Pneumatic Rectangular Gate Valve F02-53154-11

VAT Pneumatic Rectangular Gate Valve F02-56927-05

VAT Pneumatic Rectangular Gate Valve F02-56927-07

VAT Pneumatic Rectangular Gate Valve F02-56927-14

VAT Pneumatic Rectangular Gate Valve F02-56927-18

URS Corporation ASC Board 228-4-004 Rev. A

URS Corporation ASC Board 1-00003

Moore Research Center Encoder/Sensor input 3082 Rev. B